PHI Quantera Hybrid XPS

The PHI Quantera Hybrid is an upgraded model of the PHI Quantera SXM, a Scanning X-ray Microscope used for the quantitative analysis of chemical elements and chemical states within the top few nanometers of a surface. The Quantera Hybrid enables analysis of both a very small area of user interest and a large area of the uniform sample surface. Depth profiling can be accomplished with automated ion milling. Angle resolved XPS provides a nondestructive analysis of ultra-thin films, revealing thickness, composition and chemical state of each elements.

PHI Quantera Hybrid is equipped with: 

• A scanning monochromatic Al K_⍺ (1486.7 eV) x-ray source with a highly focused beam in selectable size from 9 to 200 microns
• Sample positioning station for high magnification images of the specimen surface and ease in locating analysis points 
• Multi-style sample platens, automated sample introduction and stage movement 
• Heating stage (up to 300 ℃)