JEOL JSM-IT800 SHL
COMING SPRING 2025
The JEOL JSM-IT800 (SHL) is a high-resolution field emission gun SEM equipped with advanced analytical capabilities. The system features the Super Hybrid Lens (SHL) configuration and includes multiple detectors for versatile imaging, such as Everhart Thornley detector, Scintillator backscattered electron detector, and inlens detector.
The instrument is also a combination of confocal Raman Imaging and Scanning Electron (RISE) Microscopy. It incorporates the sensitivity of the non-destructive, spectroscopic Raman technique along with the high resolution of electron microscopy.
Contact: Weinan Leng (wleng@vt.edu)
Location: ICTAS CRC room 1016
Technical Specifications
- Scanning Electron Microscope (SEM): JEOL JSM-IT800 SHL
- Accelerating voltages: 0.01 to 30 kV
- Resolution: 0.5nm @15kV, 0.7nm@1kV
- E-T detector, Scintillator backscattered electron detector, Upper electron detector, Low vacuum SE detector
- Beam deceleration mode for working on insulating specimens without the need for coating or low vacuum
- Air isolation hybrid exchange chamber
- Energy Dispersive X-ray Spectroscopy (EDS): Oxford Instruments, AZtecLive Automated Microanalysis System with a UltimMax100 (100mm2) Silicon Drift Detector (SDD), Energy Resolution on Mn Kα - 127eV at 130,000 cps
- Raman Microscope: Oxford Instruments, WITec confocal Raman microscope
- Lasers: 532, 632.8, and 785 nm
- Objective: Zeiss LD "Epiplan-Neofluar" 100x (NA: 0.75; WD: 4 mm)
- Gratings: 600/1200 gr./mm BLA=500nm and 300gr./mm BLA=750nm. Spectral resolution approximately one wavenumber, peak position accuracy 0.02 wavenumbers
- Detector: High performance Low-dark current CCD camera with maximum quantum efficiency (QE) 95% at 800 nm and overall QE>65% from 550-950 nm. Camera controller with 16 Bit A/D converter, up to 130 spectra/sec.
- TureMatch database management software and Raman spectral database (~24,000 spectra)