JEOL JXA-iHP200F

This instrument is a field emission electron probe microanalyzer. 

Electron probe microanalysis (EPMA) is a conventional term for quantitative chemical analysis performed with a specialized scanning electron microscope (SEM) equipped with multiple wavelength-dispersive x-ray spectroscopy (WDS). This instrument is also called an electron microprobe (EMP) -- or just a 'microprobe.' WDS detectors allow characteristic X-rays to be identified based on their wavelength using the principle of X-ray diffraction described by Bragg’s Law by physically moving a crystal with a known atomic unit cell (d-spacing) along a circular path so that only X-rays which satisfy the Bragg equation (nλ = 2dsinθ) are detected. This approach provides superior spectral resolution and lower detection limits compared to EDS.

• Thermionic field emission source
• Accelerating voltage: 1 to 30 kV
• Beam current regulated by Faraday cup: 1 pA to 3 μA
• Secondary electron detector spatial resolution: 20 nm at 10 kV, 10 nA; 50 nm at 10 kV, 100 nA
• Scanning magnification: 40x to 300,000x (11 mm working distance)
• Maximum scanning image resolution: 5,120 px x 3,840 px
• Five wavelength-dispersive spectrometers (WDS) with standard-sized diffraction crystals:
  • SP1: TAP/PET/LDE1/LDE2, gas flow P-10 counter
  • SP2: TAP/PET, gas flow P-10 counter  
  • SP3: PET/LiF, sealed Xe counter
  • SP4: PET/LiF, sealed Xe counter
  • SP5: TAP/LDE2, gas flow P-10 counter      
• JEOL JED-2300 30 mm² dry energy-dispersive silicon drift detector (SDD EDS) for rapid phase identification.
• Integrated software for simultaneous WDS+EDS mapping and quantitative analysis.
• Over 100 internally-mounted mineral, pure metal, and rare earth compounds reference materials available for standards-based quantification.